Maintenance Planning for Equipment Built Around a Wafer Heater

https://industrial-thermal-lab.laurelcurrent.com/posts/silicone-heater-design-considerations-for-uniform-surface-heating

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result